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Polycrystalline silicon films obtained by hot-wire chemical vapour deposition
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Silicon films were deposited at moderate substrate temperatures (280-500° C) from pure silane and a silane-hydrogen mixture (10% SiH 4, 90% H 2) in a hotwire CVD reactor. The morphology, structure and composition of the samples were studied with scanning electron microscopy, transmission electron microscopy, transmission electron diffraction, X-ray diffraction, Raman spectroscopy and secondary ion mass spectrometry. The sample deposited at 500° C with pure silane has an amorphous structure, whereas the samples obtained from silane diluted in hydrogen have a polycrystalline structure, even that grown at the lowest temperature (280° C). Polycrystalline samples have a columnar structure with 0.3-1 ?m crystallite sizes with preferential orientation in [220] direction. Deposition rates depend on the filament-substrate distance and range from 9.5 to 37 Å/s for the polycrystalline samples. The high quality of the polycrystalline samples obtained makes the hot-wire technique very promising. Moreover, it is expected to be easily scaled up for applications to large-area optoelectronic devices and to photovoltaic solar cells.
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CIFRE, J., BERTOMEU I BALAGUERÓ, Joan, PUIGDOLLERS I GONZÁLEZ, Joaquim, POLO TRASANCOS, Ma. del carmen, ANDREU I BATALLÉ, Jordi, LLORET, A.. Polycrystalline silicon films obtained by hot-wire chemical vapour deposition. _Applied Physics A: Materials Science and Processing _. 1994. Vol. 59, núm. 6, pàgs. 645-651. [consulta: 10 de gener de 2026]. ISSN: 0947-8396. [Disponible a: https://hdl.handle.net/2445/98753]