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2002

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Please use this identifier to cite or link to this item: https://hdl.handle.net/2445/8625

Characterization of nano-oxide layers fabricated by ion beam oxidation

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http://dx.doi.org/10.1109/TMAG.2002.802863

Abstract

In this paper, a remote O2 ion source is used for the formation of nano-oxide layers. The oxidation efficiency was measured in CoFe-oxide films, and a decrease of the oxide layer with the pan angle and the oxidation pressure is observed. For the same oxidation pressure, the oxidation efficiency depends on the O2 content in the Ar-O2 plasma. These results were applied in optimizing the fabrication of Al2O3 barrier for tunnel junctions. This method was also used to fabricate junctions with Fe-oxide layers inserted at the Al2O3-CoFe interface. TEM and magnetization data indicate that after anneal at 385°C, a homogeneous ferromagnetic Fe-oxide layer (Fe3O4?) is formed.

Subject

Oxidació, Aliatges de cobalt, Col·lisions (Física nuclear), Aliatges de ferro, Plasma (Gasos ionitzats), Microscòpia electrònica de transmissió, Efecte túnel

Subject (English)

Oxidation, Cobalt alloys, Collisions (Nuclear physics), Iron alloys, Plasma (Ionized gases), Transmission electron microscopy, Tunneling (Physics)

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Articles publicats en revistes (Física de la Matèria Condensada)

Citation

CARDOSO, Susana, et al. Characterization of nano-oxide layers fabricated by ion beam oxidation. IEEE Transactions on Magnetics. 2002. Vol. 38, num. 5 (Part 1), pags. 2755-2757. ISSN 0018-9464. [consulted: 7 of June of 2026]. Available at: https://hdl.handle.net/2445/8625

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