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Monte Carlo simulation of x-ray emission by kilovolt electron bombardment

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A physical model for the simulation of x-ray emission spectra from samples irradiated with kilovolt electron beams is proposed. Inner shell ionization by electron impact is described by means of total cross sections evaluated from an optical-data model. A double differential cross section is proposed for bremsstrahlung emission, which reproduces the radiative stopping powers derived from the partial wave calculations of Kissel, Quarles and Pratt [At. Data Nucl. Data Tables 28, 381 (1983)]. These ionization and radiative cross sections have been introduced into a general-purpose Monte Carlo code, which performs simulation of coupled electron and photon transport for arbitrary materials. To improve the efficiency of the simulation, interaction forcing, a variance reduction technique, has been applied for both ionizing collisions and radiative events. The reliability of simulated x-ray spectra is analyzed by comparing simulation results with electron probe measurements.

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ACOSTA, Eva, et al. Monte Carlo simulation of x-ray emission by kilovolt electron bombardment. Journal of Applied Physics. 1998. Vol. 83, num. 11, pags. 6038-6049. ISSN 0021-8979. [consulted: 15 of August of 2026]. Available at: https://hdl.handle.net/2445/24113

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