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Monte Carlo simulation of x-ray emission by kilovolt electron bombardment
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A physical model for the simulation of x-ray emission spectra from samples irradiated with kilovolt electron beams is proposed. Inner shell ionization by electron impact is described by means of total cross sections evaluated from an optical-data model. A double differential cross section is proposed for bremsstrahlung emission, which reproduces the radiative stopping powers derived from the partial wave calculations of Kissel, Quarles and Pratt [At. Data Nucl. Data Tables 28, 381 (1983)]. These ionization and radiative cross sections have been introduced into a general-purpose Monte Carlo code, which performs simulation of coupled electron and photon transport for arbitrary materials. To improve the efficiency of the simulation, interaction forcing, a variance reduction technique, has been applied for both ionizing collisions and radiative events. The reliability of simulated x-ray spectra is analyzed by comparing simulation results with electron probe measurements.
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ACOSTA, Eva, LLOVET XIMENES, Xavier, COLEONI, Enrique andrés, RIVEROS, J. a., SALVAT GAVALDÀ, Francesc. Monte Carlo simulation of x-ray emission by kilovolt electron bombardment. _Journal of Applied Physics_. 1998. Vol. 83, núm. 11, pàgs. 6038-6049. [consulta: 25 de febrer de 2026]. ISSN: 0021-8979. [Disponible a: https://hdl.handle.net/2445/24113]