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Progress in single junction microcrystalline silicon solar cells deposited by Hot-Wire CVD

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Hot-Wire Chemical Vapor Deposition has led to microcrystalline silicon solar cell efficiencies similar to those obtained with Plasma Enhanced CVD. The light-induced degradation behavior of microcrystalline silicon solar cells critically depends on the properties of their active layer. In the regime close to the transition to amorphous growth (around 60% of amorphous volume fraction), cells incorporating an intrinsic layer with slightly higher crystalline fraction and [220] preferential orientation are stable after more than 7000 h of AM1.5 light soaking. On the contrary, solar cells whose intrinsic layer has a slightly lower crystalline fraction and random or [111] preferential orientation exhibit clear light-induced degradation effects. A revision of the efficiencies of Hot-Wire deposited microcrystalline silicon solar cells is presented and the potential efficiency of this technology is also evaluated.

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FONRODONA TURON, Marta, SOLER VILAMITJANA, David, VILLAR, Fernando, ESCARRÉ I PALOU, Jordi, ASENSI LÓPEZ, José miguel, BERTOMEU I BALAGUERÓ, Joan, ANDREU I BATALLÉ, Jordi. Progress in single junction microcrystalline silicon solar cells deposited by Hot-Wire CVD. _Thin Solid Films_. 2006. Vol. 501, núm. 1-2, pàgs. 247-251. [consulta: 23 de gener de 2026]. ISSN: 0040-6090. [Disponible a: https://hdl.handle.net/2445/47300]

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