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Epitaxial growth of Y-doped SrZrO3 films on MgO by pulsed laser deposition

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Epitaxial thin films of Y¿doped SrZrO3 have been grown on MgO(001) by pulsed laser deposition. The deposition process has been performed at temperatures of 1000¿1200¿°C and at an oxygen pressure of 1.5×10¿1 mbar. The samples are characterized by Rutherford backscattering spectrometry/channeling (RBS/C) and x¿ray diffraction (XRD). We found an epitaxial relationship of SrZrO3 (0k0) [101]¿MgO (001) [100]. Good crystalline quality is confirmed by RBS/C minimum yield values of 9% and a FWHM of 0.35° of the XRD rocking curve.

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BECKERS, L., et al. Epitaxial growth of Y-doped SrZrO3 films on MgO by pulsed laser deposition. Journal of Applied Physics. 1996. Vol. 79, num. 6, pags. 3337-3339. ISSN 0021-8979. [consulted: 22 of May of 2026]. Available at: https://hdl.handle.net/2445/24791

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