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1-s2.0-S1877705815022778-main.pdf (1001.01 KB)

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Published version

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2015-09-11

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CC BY-NC-ND, (c) Samà et al., 2015
Please use this identifier to cite or link to this item: https://hdl.handle.net/2445/103303

Locally grown SnO2 NWs as low power ammonia sensor

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http://doi.org/10.1016/j.proeng.2015.08.614

Abstract

Localized growth of SnO2 nanowires on top of CMOS compatible micromembranes that incorporate a buried heater and prepatterned interdigitated electrodes has been achieved that presents the advantage that it allows to easily and directly integrate the advantageous properties of quasi-one dimensional structures in an advanced electronic device by a Vapor Liquid Solid (VLS) mechanism. A NWs based sensor of this type is characterized as a low power gas sensor towards NH3 at different temperatures. Stable and reproducible response is obtained, that allows detecting concentrations below the time-weighted average exposure limit for 8 h.

Subject

Amoníac, Detectors de gasos

Subject (English)

Ammonia, Gas detectors

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Comunicacions a congressos (Enginyeria Electrònica i Biomèdica)
Publicacions de projectes de recerca finançats per la UE

Citation

SAMÀ MONSONÍS, Jordi, et al. Locally grown SnO2 NWs as low power ammonia sensor. Comunicació presentada a: Eurosensors 2015 Conference. XXIX edition. September 6 to 9. Vol. Freiburg, num. BS 07– Micro- / nanofabrication for MEMS II [BS07-2]. ISSN 1877-7058. [consulted: 9 of August of 2026]. Available at: https://hdl.handle.net/2445/103303

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