Quantitative x-ray photoelectron spectroscopy study of Al/AlOx bilayers
| dc.contributor.author | Batlle Gelabert, Xavier | cat |
| dc.contributor.author | Hattink, Bart Jan | cat |
| dc.contributor.author | Labarta, Amílcar | cat |
| dc.contributor.author | Åkerman, Johan J. | cat |
| dc.contributor.author | Escudero, Roberto | cat |
| dc.contributor.author | Schuller, Ivan K. | cat |
| dc.date.accessioned | 2012-02-16T08:49:37Z | |
| dc.date.available | 2012-02-16T08:49:37Z | |
| dc.date.issued | 2002 | |
| dc.description.abstract | An x-ray photoelectron spectroscopy (XPS) analysis of Nb/Al wedge bilayers, oxidized by both plasma and natural oxidation, is reported. The main goal is to show that the oxidation state¿i.e., O:(oxidize)Al ratio¿, structure and thickness of the surface oxide layer, as well as the thickness of the metallic Al leftover, as functions of the oxidation procedure, can be quantitatively evaluated from the XPS spectra. This is relevant to the detailed characterization of the insulating barriers in (magnetic) tunnel junctions | eng |
| dc.format.extent | 6 p. | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.idgrec | 196861 | |
| dc.identifier.issn | 0021-8979 | |
| dc.identifier.uri | https://hdl.handle.net/2445/22090 | |
| dc.language.iso | eng | eng |
| dc.publisher | American Institute of Physics | |
| dc.relation.isformatof | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.1478791 | |
| dc.relation.ispartof | Journal of Applied Physics, 2002, vol. 91, núm. 12, p. 10163-10168 | |
| dc.relation.uri | http://dx.doi.org/10.1063/1.1478791 | |
| dc.rights | X-ray spectroscopy | |
| dc.rights | (c) American Institute of Physics, 2002 | |
| dc.rights.accessRights | info:eu-repo/semantics/openAccess | |
| dc.source | Articles publicats en revistes (Física de la Matèria Condensada) | |
| dc.subject.classification | Espectroscòpia de raigs X | cat |
| dc.subject.classification | Fotoelectrons | cat |
| dc.subject.classification | Espectroscòpia d'electrons | cat |
| dc.subject.classification | Materials magnètics | cat |
| dc.subject.other | Photoelectrons | eng |
| dc.subject.other | Electron spectroscopy | eng |
| dc.subject.other | Magnetic materials | eng |
| dc.title | Quantitative x-ray photoelectron spectroscopy study of Al/AlOx bilayers | eng |
| dc.type | info:eu-repo/semantics/article | |
| dc.type | info:eu-repo/semantics/publishedVersion |
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