Carregant...
Miniatura

Tipus de document

Treball de fi de grau

Data de publicació

Llicència de publicació

cc-by-nc-nd (c) Ramis, 2018
Si us plau utilitzeu sempre aquest identificador per citar o enllaçar aquest document: https://hdl.handle.net/2445/124577

MoOx thin films deposition by reactive RF-magnetron sputtering

Títol de la revista

ISSN de la revista

Títol del volum

Recurs relacionat

Resum

Sub-stoichiometric molybdenum oxide (MoOx, x < 3) thin films are deposited and analyzed to find optimum parameters for its use in heterojunction solar-cells. Deposition is done on n-type crystalline silicon wafer and glass substrates by reactive RF-magnetron sputtering. Oxygen partial pressure and deposition pressure are the two parameters used to vary stoichiometry inflluencing other characteristics. Stoichiometric composition, thickness, electrical properties and optical response have been studied to characterize the deposited thin films. MoOx, as other transition metal oxides, on the n-type silicon wafer act as a hole-selective layer. It is a good way of providing a p+-n junction without using dopant.

Descripció

Treballs Finals de Grau de Física, Facultat de Física, Universitat de Barcelona, Curs: 2018, Tutor: Joan Bertomeu

Citació

Citació

RAMIS-MASACHS, Mireia. MoOx thin films deposition by reactive RF-magnetron sputtering. [consulta: 21 de gener de 2026]. [Disponible a: https://hdl.handle.net/2445/124577]

Exportar metadades

JSON - METS

Compartir registre